Rotary Air Bearing Goniometer
The ultra-precision, high stiffness air bearing table is the key element of the SpectroMaster®, as it determines the angular resolution and measurement accuracy of the minimum deviation angle and apex angle, and thus the overall accuracy of the refractive index measurement. The axial and radial run-out errors of this bearing are smaller than 0.05 µm. It is supplied with an air control unit including pressure gauge and adjustment, particle filter and air dryer. An oil-free factory air supply net or a dedicated compressor is needed at the input of the air control unit. Further specification of the air supply is available upon request.
The goniometer embodies an ultra-precision Heidenhain goniometer unit with an angular resolution of 0.036 arcsec and a software-enhanced accuracy of better +/- 0.2 arcsec. Specially selected goniometers are used for the SpectroMaster® HR instrument.
The motorized version of SpectroMaster® HR is driven by a highly dynamic and ultraprecise backlash free piezo motor drive. The piezo motors generate no significant excess heat for optimum temperature stability at the place of the sample. For the same reason, also the rotary and linear sample table stages are piezo driven. The piezo drive combines both, high measurement speeds and sub-arcsecond positioning accuracy.
The manual version of SpectroMaster® HR employs a differential micrometer screw for highest sensitivity and accuracy during the manual adjustment of the telescope angle. Due to the sophisticated software assistance and alignment indicators, it has been proven that manual operators can reach the same high accuracy of the motorized version but at the cost of reduced measurement speed.
Detectors
The most convenient and fastest measurements are done with the CCD camera in the spectral range between 400…1050 nm. Optionally, a special UV-enhanced CCD camera is available which extends the usable UV range down to 250 nm. The CCD camera is also used for measuring the apex angle in autocollimation mode.
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Air bearing table with manual rotation and adjusting unit

Air bearing table with ultra-accurate
piezoelectric drive
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